Experimental-numerical technique to evaluate the thickness of tin thin film

In this study, the numerical analysis of instrumented indentation testing was combined with the experimental procedure to evaluate the mechanical properties and thickness of a titanium nitride (TiN) film deposited on titanium substrate (Ti) by plasma processing. TiN film thickness is an important pa...

ver descrição completa

Na minha lista:
Detalhes bibliográficos
Principais autores: Dias, Avelino Manuel da Silva, Silva, Everton Carneiro da, Libório, Maxwell Santana
Formato: article
Idioma:English
Publicado em: Materials Research
Assuntos:
experimental-numerical analysis
tin film
indentation testing
film thickness
FEM
Endereço do item:https://repositorio.ufrn.br/handle/123456789/45445
http://dx.doi.org/10.1590/1980-5373-mr-2018-0283
Tags: Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
id ri-123456789-45445
record_format dspace
spelling ri-123456789-454452021-12-17T12:16:46Z Experimental-numerical technique to evaluate the thickness of tin thin film Dias, Avelino Manuel da Silva Silva, Everton Carneiro da Libório, Maxwell Santana experimental-numerical analysis tin film indentation testing film thickness FEM In this study, the numerical analysis of instrumented indentation testing was combined with the experimental procedure to evaluate the mechanical properties and thickness of a titanium nitride (TiN) film deposited on titanium substrate (Ti) by plasma processing. TiN film thickness is an important parameter for the surface treatment industry. In numerical analysis, the finite elements method (FEM) was applied using Marc™ commercial software. Initially, the mechanical properties of the film and substrate were determined using a numerical-experimental methodology, combining the results of indentation testing with a Berkovich indenter and the same numerical simulation for both the film and substrate. Next, the behavior of instrumented Vickers hardness as a function of maximum indenter penetration depth (hmax) was compared with the numerical results of this hardness as a function of the ratio between penetration depth and film thickness (hmax/t). Both curves were fitted using power law equations, which calculated film thickness applying a new convergence algorithm. Finally, it also was shown that the film thickness obtained agrees with the experimental range reported in the literature. 2021-12-17T12:16:46Z 2021-12-17T12:16:46Z 2019 article DIAS, Avelino Manuel da Silva; SILVA, Everton Carneiro da; LIBÓRIO, Maxwell Santana. Experimental-numerical technique to evaluate the thickness of tin thin film. Materials Research, [S.l.], v. 22, n. 5, p. 1-7, set. 2019. FapUNIFESP (SciELO). Disponível em: https://www.scielo.br/scielo.php?script=sci_abstract&pid=S1516-14392019000500201&lng=en&nrm=iso&tlng=en. Acesso em: 28 set. 2021. DOI: http://dx.doi.org/10.1590/1980-5373-mr-2018-0283. 1516-1439 1980-5373 https://repositorio.ufrn.br/handle/123456789/45445 http://dx.doi.org/10.1590/1980-5373-mr-2018-0283 en Attribution 3.0 Brazil http://creativecommons.org/licenses/by/3.0/br/ application/pdf Materials Research
institution Repositório Institucional
collection RI - UFRN
language English
topic experimental-numerical analysis
tin film
indentation testing
film thickness
FEM
spellingShingle experimental-numerical analysis
tin film
indentation testing
film thickness
FEM
Dias, Avelino Manuel da Silva
Silva, Everton Carneiro da
Libório, Maxwell Santana
Experimental-numerical technique to evaluate the thickness of tin thin film
description In this study, the numerical analysis of instrumented indentation testing was combined with the experimental procedure to evaluate the mechanical properties and thickness of a titanium nitride (TiN) film deposited on titanium substrate (Ti) by plasma processing. TiN film thickness is an important parameter for the surface treatment industry. In numerical analysis, the finite elements method (FEM) was applied using Marc™ commercial software. Initially, the mechanical properties of the film and substrate were determined using a numerical-experimental methodology, combining the results of indentation testing with a Berkovich indenter and the same numerical simulation for both the film and substrate. Next, the behavior of instrumented Vickers hardness as a function of maximum indenter penetration depth (hmax) was compared with the numerical results of this hardness as a function of the ratio between penetration depth and film thickness (hmax/t). Both curves were fitted using power law equations, which calculated film thickness applying a new convergence algorithm. Finally, it also was shown that the film thickness obtained agrees with the experimental range reported in the literature.
format article
author Dias, Avelino Manuel da Silva
Silva, Everton Carneiro da
Libório, Maxwell Santana
author_facet Dias, Avelino Manuel da Silva
Silva, Everton Carneiro da
Libório, Maxwell Santana
author_sort Dias, Avelino Manuel da Silva
title Experimental-numerical technique to evaluate the thickness of tin thin film
title_short Experimental-numerical technique to evaluate the thickness of tin thin film
title_full Experimental-numerical technique to evaluate the thickness of tin thin film
title_fullStr Experimental-numerical technique to evaluate the thickness of tin thin film
title_full_unstemmed Experimental-numerical technique to evaluate the thickness of tin thin film
title_sort experimental-numerical technique to evaluate the thickness of tin thin film
publisher Materials Research
publishDate 2021
url https://repositorio.ufrn.br/handle/123456789/45445
http://dx.doi.org/10.1590/1980-5373-mr-2018-0283
work_keys_str_mv AT diasavelinomanueldasilva experimentalnumericaltechniquetoevaluatethethicknessoftinthinfilm
AT silvaevertoncarneiroda experimentalnumericaltechniquetoevaluatethethicknessoftinthinfilm
AT liboriomaxwellsantana experimentalnumericaltechniquetoevaluatethethicknessoftinthinfilm
_version_ 1773963351125131264

Registros relacionados