Experimental-numerical technique to evaluate the thickness of tin thin film

In this study, the numerical analysis of instrumented indentation testing was combined with the experimental procedure to evaluate the mechanical properties and thickness of a titanium nitride (TiN) film deposited on titanium substrate (Ti) by plasma processing. TiN film thickness is an important pa...

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Detalhes bibliográficos
Principais autores: Dias, Avelino Manuel da Silva, Silva, Everton Carneiro da, Libório, Maxwell Santana
Formato: article
Idioma:English
Publicado em: Materials Research
Assuntos:
FEM
Endereço do item:https://repositorio.ufrn.br/handle/123456789/45445
http://dx.doi.org/10.1590/1980-5373-mr-2018-0283
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