Caracterização de câmara para pós-descarga de cátodo ôco à baixa pressão
Many applications require that the plasma discharge is produced apart from the surface to be processed, thus preventing damage caused by bombardment and/or plasma radiation. In the post-discharge regime in various applications thermally sensitive materials can be used. Thus, knowledge of the charact...
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| Egile Nagusiak: | , , , , , , , |
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| Formatua: | article |
| Hizkuntza: | pt_BR |
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Revista Brasileira de Inovação Tecnologica em Saúde
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| Sarrera elektronikoa: | https://repositorio.ufrn.br/jspui/handle/123456789/29543 |
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