Submicron fabrication by local anodic oxidation of germanium thin films
Here we describe a lithography scheme based on the local anodic oxidation of germanium film by a scanning atomic force microscope in a humidity-controlled atmosphere. The oxidation kinetics of the Ge film were investigated by a tapping mode, in which a pulsed bias voltage was synchronized and applie...
Na minha lista:
Principais autores: | , , |
---|---|
Formato: | article |
Idioma: | English |
Publicado em: |
IOP PUBLISHING
|
Assuntos: | |
Endereço do item: | https://repositorio.ufrn.br/jspui/handle/123456789/28845 |
Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|