Reactive Sputter Deposition
The use of thin films is continuously expanding. In the family of Physical Vapour Deposition techniques, sputtering is one of the most important over the past 40 years. In this book, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, ar...
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| Principais autores: | , , |
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| Formato: | Digital |
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| Endereço do item: | http://dx.doi.org/10.1007/978-3-540-76664-3 |
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