Efeito da posição e da corrente elétrica nas propriedades de filmes de AZO depositados por magnetron sputtering DC sem recozimento e aplicação de filme finos de TiO2
Aluminum-doped zinc oxide (AZO) has important applications in the opticalelectronic area. Among the various techniques for obtaining thin films, magnetron sputtering is well suited for uniform and dense films. Aluminum-doped ZnO films were deposited on glass substrate by magnetron sputtering at a...
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| Format: | doctoralThesis |
| Język: | por |
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Brasil
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| Dostęp online: | https://repositorio.ufrn.br/jspui/handle/123456789/26392 |
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