Construção de um aparato experimental para monitoramento in situ da deposição de filmes finos de titânio por magnetron sputtering
The technique of surface coating using magnetron sputtering is one of the most widely used in the surface engineering, for its versatility in obtaining different films as well as in the micro / nanometric thickness control. Among the various process parameters, those related to the active species of...
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| Format: | Dissertação |
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Universidade Federal do Rio Grande do Norte
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| Online dostop: | https://repositorio.ufrn.br/jspui/handle/123456789/12805 |
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