Construção, caracterização e aplicação de eletrodos para descarga por arco de cátodo oco

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The system built to characterize electrodes and, consequently, deposited fine films are constituted by a hollow cathode that works to discharges and low pressures (approximately 10-3 to 5 mbar), a source DC (0 to 1200 V), a cylindrical camera of closed borossilicato for flanges of stainless steel w...

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Bibliographic Details
Main Author: Almeida, Edalmy Oliveira de
Other Authors: Alves Júnior, Clodomiro
Format: doctoralThesis
Language:por
Published: Universidade Federal do Rio Grande do Norte
Subjects:
Arco de cátodo oco
Filmes finos
Pulverização
Coluna interna de Plasma
Cavidades esféricas
Arch of hollow cathode
Fine films
Spray
Column interns of Plasma
Spherical cavities
CNPQ::ENGENHARIAS::ENGENHARIA DE MATERIAIS E METALURGICA
Online Access:https://repositorio.ufrn.br/jspui/handle/123456789/12724
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