Evolution of Thin Film Morphology Modeling and Simulations /

Thin film deposition is the most ubiquitous and critical of the processes used to manufacture high tech devices. Morphology and microstructure of thin films directly controls their optical, magnetic, and electrical properties. This book focuses on modeling and simulations used in research on the mor...

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Principais autores: Pelliccione, Matthew., Lu, Toh-Ming., SpringerLink (Online service)
Formato: Digital
Publicado em:
Assuntos:
Materiais.
Química inorgânica.
Física.
Endereço do item:http://dx.doi.org/10.1007/978-0-387-75109-2
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spelling oai:localhost:123456789-1299392023-07-17T15:13:41Z Evolution of Thin Film Morphology Modeling and Simulations / Pelliccione, Matthew. Lu, Toh-Ming. SpringerLink (Online service) Materiais. Química inorgânica. Física. Thin film deposition is the most ubiquitous and critical of the processes used to manufacture high tech devices. Morphology and microstructure of thin films directly controls their optical, magnetic, and electrical properties. This book focuses on modeling and simulations used in research on the morphological evolution during film growth. The authors emphasize the detailed mathematical formulation of the problem both through numerical calculations based on Langevin continuum equations, and through Monte Carlo simulations based on discrete surface growth models when an analytical formulism is not convenient. Evolution of Thin-Film Morphology will be of benefit to university researchers and industrial scientists working in the areas of semiconductor processing, optical coating, plasma etching, patterning, micro-machining, polishing, tribology, and any discipline that requires an understanding of thin film growth processes. In particular, the reader will be introduced to the mathematical tools that are available to describe such a complex problem, and appreciate the utility of the various modeling methods through numerous example discussions. For beginners in the field, the text is written assuming a minimal background in mathematics and computer programming. The book will enable readers themselves to set up a computational program to investigate specific topics of interest in thin film deposition. 0 2022-10-06T07:54:29Z 2022-10-06T07:54:29Z 2008. Digital 620.1 P391e 9780387751092 198148 http://dx.doi.org/10.1007/978-0-387-75109-2 http://dx.doi.org/10.1007/978-0-387-75109-2
institution Acervo SISBI
collection SIGAA
topic Materiais.
Química inorgânica.
Física.
spellingShingle Materiais.
Química inorgânica.
Física.
Pelliccione, Matthew.
Lu, Toh-Ming.
SpringerLink (Online service)
Evolution of Thin Film Morphology Modeling and Simulations /
description Thin film deposition is the most ubiquitous and critical of the processes used to manufacture high tech devices. Morphology and microstructure of thin films directly controls their optical, magnetic, and electrical properties. This book focuses on modeling and simulations used in research on the morphological evolution during film growth. The authors emphasize the detailed mathematical formulation of the problem both through numerical calculations based on Langevin continuum equations, and through Monte Carlo simulations based on discrete surface growth models when an analytical formulism is not convenient. Evolution of Thin-Film Morphology will be of benefit to university researchers and industrial scientists working in the areas of semiconductor processing, optical coating, plasma etching, patterning, micro-machining, polishing, tribology, and any discipline that requires an understanding of thin film growth processes. In particular, the reader will be introduced to the mathematical tools that are available to describe such a complex problem, and appreciate the utility of the various modeling methods through numerous example discussions. For beginners in the field, the text is written assuming a minimal background in mathematics and computer programming. The book will enable readers themselves to set up a computational program to investigate specific topics of interest in thin film deposition.
format Digital
author Pelliccione, Matthew.
Lu, Toh-Ming.
SpringerLink (Online service)
author_facet Pelliccione, Matthew.
Lu, Toh-Ming.
SpringerLink (Online service)
author_sort Pelliccione, Matthew.
title Evolution of Thin Film Morphology Modeling and Simulations /
title_short Evolution of Thin Film Morphology Modeling and Simulations /
title_full Evolution of Thin Film Morphology Modeling and Simulations /
title_fullStr Evolution of Thin Film Morphology Modeling and Simulations /
title_full_unstemmed Evolution of Thin Film Morphology Modeling and Simulations /
title_sort evolution of thin film morphology modeling and simulations /
publishDate 2022
url http://dx.doi.org/10.1007/978-0-387-75109-2
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